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  • Publication Date: December 31, 1969
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    KR-100857629-B1September 08, 2008실버브룩 리서치 피티와이 리미티드Method of removing polymer coating from an etched trench
    KR-101269527-B1May 30, 2013가부시키가이샤 웨이브락 어드벤스드 테크놀로지, 도쿠리츠교세이호징 고쿠리츠코토센몬갓코키코관통구멍 형성 방법, 및, 관통구멍 형성 가공품
    US-7588693-B2September 15, 2009Silverbrook Research Pty LtdMethod of modifying an etched trench
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    US-8704127-B2April 22, 2014Wavelock Advanced Technology Co., Ltd.Method of forming a through hole by laser drilling
    WO-2009107837-A1September 03, 2009株式会社ワイズ・マイクロテクノロジー, 独立行政法人国立高等専門学校機構Through hole forming method, and product having through hole